# US 9,751,306 B2 · Piezoelectric device, liquid ejecting head and method for manufacturing piezoelectric device

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- Number: US 9,751,306 B2
- Document ID: US9751306B2
- Status: Granted
- Kind: B2
- Application number: 15/205,065
- Filed: 2016-07-08
- Published: 2017-02-02
- Granted: 2017-09-05
- Earliest claimed: 2015-07-28
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Naoya Sato; Shuichi Tanaka; Masashi Yoshiike; Naohiro Nakagawa
- Web page: https://patentgrep.com/patent/US9751306B2

## CPC

- B41J 2/14201: {Structure of print heads with piezoelectric elements}
- B41J 2/14072: {Electrical connections, e.g. details on electrodes, connecting the chip to the outside...}
- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/161: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/1623: {bonding and adhesion}
- B41J 2/1626: {etching}
- B41J 2/1631: {photolithography}
- B41J 2/1632: {machining}
- B41J 2/1643: {thin film formation by plating}
- B41J 2002/14362: {Assembling elements of heads}
- B41J 2002/14491: {Electrical connection}
- B41J 2202/18: Electrical connection established using vias
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

A piezoelectric device includes a first substrate having a piezoelectric element on one surface thereof and a second substrate having penetration wiring that includes a through hole formed in a thickness direction thereof and a conductor section formed in the through hole. A resin section is formed on a surface of one substrate of one of the first substrate and the second substrate, which opposes the other substrate, and is formed of an elastic body in a shape protruding toward the other substrate, and a first electrode layer is formed on the surface of the other substrate side of the resin section. A second electrode layer is formed on a surface of the other substrate that opposes the one substrate, and the first substrate and the second substrate are joined in a state in which the first electrode layer and the second electrode layer are abutting against each other.

## Claims

### Claim 1

A piezoelectric device comprising:
a first substrate having a piezoelectric element on one surface thereof; and
a second substrate having penetration wiring that includes a through hole formed in a thickness direction thereof and a conductor section formed in the through hole,
wherein a resin section is formed on a surface of one substrate of one of the first substrate and the second substrate, which opposes the other substrate, and is formed of an elastic body in a shape protruding toward the other substrate; and a first electrode layer is formed on the surface of the other substrate side of the resin section,
wherein a second electrode layer, which is electrically connected to the first electrode layer, is formed on a surface of the other substrate that opposes the one substrate,
wherein the first substrate and the second substrate are joined in a state in which the first electrode layer and the second electrode layer are abutting against each other, and
wherein a part of the resin section protruding toward the second electrode layer is disposed between the one substrate and the first electrode layer.

### Claim 2 (depends on 1)

The piezoelectric device according to claim 1,
wherein a curved surface of the resin section and the first electrode layer opposing the other substrate includes a portion that is curved in an arc shape.

### Claim 3 (depends on 2)

A liquid ejecting head comprising:
the piezoelectric device according to claim 2.

### Claim 4 (depends on 1)

The piezoelectric device according to claim 1,
wherein the resin section and the first electrode layer are formed on the first substrate, and
wherein the second electrode layer is formed on the second substrate.

### Claim 5 (depends on 4)

A liquid ejecting head comprising:
the piezoelectric device according to claim 4.

### Claim 6 (depends on 1)

A liquid ejecting head comprising:
the piezoelectric device according to claim 1.