# US 9,751,142 B2 · High-frequency-vibration-assisted electrolytic grinding method and device therefor

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 9,751,142 B2
- Document ID: US9751142B2
- Status: Granted
- Kind: B2
- Application number: 14/400,482
- Filed: 2013-04-12
- Published: 2015-08-20
- Granted: 2017-09-05
- Earliest claimed: 2012-07-11
- Assignees: Micron Machinery Co., Ltd.
- Applicants: Micron Machinery Co., LTD
- Inventors: Toru Tachibana; Satoshi Kobayashi; Masayuki Takahashi; Chikashi Murakoshi; Kazunori Koike
- Web page: https://patentgrep.com/patent/US9751142B2

## CPC

- B23H 5/08: Electrolytic grinding
- B23H 7/38: Influencing metal working by using specially adapted means not directly involved in the removal of metal, e.g. ultrasonic waves, magnetic fields or laser irradiation
- B24B 1/002: {using electric current (B24B37/046 and B23H5/08 take precedence)}
- B24B 1/04: subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency (involving oscillating or vibrating containers B24B31/06; superfinishing surfaces on work, e.g. by means of abrading blocks reciprocating with high frequency, B24B35/00)
- B24B 5/06: for grinding cylindrical surfaces internally (B24B5/40 takes precedence)
- C25F 3/02: Etching
- C25F 7/00: Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects (for both electrolytic coating and removal C25D); Servicing or operating
- B23H: WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL (processes for the electrolytic or electrophoretic production of coatings, electroforming, or apparatus therefor C25D; processes for the electrolytic removal of material from objects C25F; manufacturing printed circuits using precipitation techniques to apply the conductive material to form the desired conductive pattern H05K3/18)
- B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- C25F: PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR

## Abstract

To provide a high-frequency-vibration-assisted electrolytic grinding method and a device therefor in which micro abrasive grains can be used so as to improve the grinding accuracy and efficiency. A high-frequency-vibration-assisted electrolytic grinding method in which a work is grinded by a grinding stone while electrolytic reaction is performed by applying a voltage between the grinding stone and the work through an electrolytic solution and high-frequency vibration is transmitted to the grinding stone or the work wherein; the grinding stone has non-conductive micro abrasive grains with grain sizes of less than #400 in accordance with the JIS R6001 standard of grinding stones for precision polishing projecting from its surface formed of conductive binding material, and the distance between the grinding stone and the work, which is regulated by the projecting lengths of the micro abrasive grains from the base of the grinding stone, is set to less than 0.02 mm.

## Claims

### Claim 1

A high-frequency-vibration-assisted electrolytic grinding method, the method comprising:
grinding a work with a grinding stone while an electrolytic reaction is performed by applying a voltage between the grinding stone and the work through an electrolytic solution while a high-frequency vibration is transmitted to at least one of the grinding stone and the work in a direction that is axial to the grinding stone, wherein;
the grinding stone has non-conductive micro abrasive grains with grain sizes of less than #400 in accordance with the JIS 6001 standard of grinding stones for precision polishing projecting from its surface, which comprises a conductive binding material, and
a distance between the grinding stone and the work, which is regulated by a projecting length of the micro abrasive grains extending from a base of the grinding stone, is set to less than 0.02 mm.

### Claim 2 (depends on 1)

The method of claim 1, further comprising:
applying a pulse current having a duty ratio of 5 to 50% between the grinding stone and the work such that an average voltage between the grinding stone and the work is set between 1 and 10V.

### Claim 3

A high-frequency-vibration-assisted electrolytic grinding device comprising:
a grinding stone having non-conductive micro abrasive grains with grain sizes of less than #400 in accordance with the JIS R6001 standard of grinding stones for precision polishing projecting from its surface, which comprises a conductive binding material;
a vibrator to transmit high-frequency vibration to at least one of the grinding stone and a work, wherein the high-frequency vibration is transmitted in an axial direction of the grinding stone;
a holding mechanism that is configured to hold the work in a position such that a portion of the grinding stone extends into an opening in the work when the high-frequency vibration is transmitted in the axial direction of the grinding stone; and
an electrolysis regulator to perform electrolytic grinding by applying a voltage between the grinding stone and the work through an electrolytic solution, wherein
the device is configured to perform electrolytic grinding while transmitting the high-frequency vibration to at least one of the grinding stone and the work so as to induce or promote an electrolytic reaction between the grinding stone and the work when a distance between the grinding stone and the work, which is regulated by projecting lengths of the micro abrasive grains from a base of the grinding stone, is set to less than 0.02 mm.

### Claim 4 (depends on 2)

The method of claim 2, wherein the average voltage between the grinding stone and the work is set less than 4V.

### Claim 5 (depends on 2)

The method of claim 2, wherein the average voltage between the grinding stone and the work is set between 5V and 10V.

### Claim 6 (depends on 1)

The method of claim 1, wherein the high-frequency vibration has a frequency of 20 kHz or more.

### Claim 7 (depends on 3)

The device of claim 3, wherein the holding mechanism comprises a main shaft that is configured to chuck the work and to move the work in a cutting direction of the grinding stone.

### Claim 8

A high-frequency-vibration-assisted electrolytic grinding method, the method comprising:
grinding a work with a grinding stone while an electrolytic reaction is performed by applying a voltage between the grinding stone and the work through an electrolytic solution while a high-frequency vibration is transmitted to at least one of the grinding stone and the work in a direction that is axial to the grinding stone and while a portion of the grinding stone is inserted into an opening in the work, wherein;
the grinding stone has non-conductive micro abrasive grains with grain sizes of less than #400 in accordance with the JIS R6001 standard of grinding stones for precision polishing projecting from its surface, which comprises a conductive binding material, and
a distance between the grinding stone and the work, which is regulated by a projecting length of the micro abrasive grains extending from a base of the grinding stone, is set to less than 0.02 mm.

### Claim 9 (depends on 8)

The method of claim 8, further comprising:
applying a pulse current having a duty ratio of 5 to 50% between the grinding stone and the work such that an average voltage between the grinding stone and the work is set between and 10V.

### Claim 10 (depends on 9)

The method of claim 9, wherein the average voltage between the grinding stone and the work is set less than 4V.

### Claim 11 (depends on 9)

The method of claim 9, wherein the average voltage between the grinding stone and the work is greater than 5V.

### Claim 12 (depends on 9)

The method of claim 9, wherein the average voltage between the grinding stone and the work is set between 5V and 10V.

### Claim 13 (depends on 1)

The method of claim 1, wherein the high-frequency vibration has a frequency of 20 kHz or more.
