X-ray fluorescence spectrometer and X-ray fluorescence analyzing method

An X-ray fluorescence analyzing method comprising preparing:

• an X-ray source configured to irradiate, with primary X-rays, a sample that is multiple nanoparticles placed on a substrate;
• an irradiation angle adjustment unit configured to adjust an irradiation angle at which a surface of the substrate is irradiated with the primary X-rays;
• a detection unit configured to measure an intensity of fluorescent X-rays generated from the sample;
• and a plurality of standard samples each of which includes nanoparticles having a known uniform particle diameter, and among which the uniform particle diameter is different,
• irradiating each standard sample with the primary X-rays for which an irradiation angle is adjusted by using the irradiation angle adjustment unit, and measuring, by the detection unit, an intensity of fluorescent X-rays generated from the standard sample each time the irradiation angle is adjusted,
• generating a sample profile representing change of the intensity of the fluorescent X-rays against change of the irradiation angle, and calculating a peak irradiation angle position at which the fluorescent X-rays indicate a highest intensity in the sample profile,
• generating a particle diameter calibration curve representing a correlation between the peak irradiation angle position calculated for each standard sample, and the particle diameter of the nanoparticles,
• preparing an unknown sample,
• irradiating the unknown sample with the primary X-rays for which an irradiation angle is adjusted by using the irradiation angle adjustment unit, and measuring, by the detection unit, an intensity of fluorescent X-rays generated from the unknown sample each time irradiation is performed,
• generating a sample profile representing change of the intensity of the fluorescent X-rays against change of the irradiation angle, and calculating a peak irradiation angle position at which the fluorescent X-rays indicate a highest intensity in the sample profile, and
• calculating a particle diameter of nanoparticles of the unknown sample by applying the peak irradiation angle position calculated for the unknown sample, to the particle diameter calibration curve.