Sensor, method for forming the same, and method of controlling the same

Abstract

According to embodiments of the present invention, a sensor for determining a flow parameter of a fluid is provided. The sensor includes a polymer membrane, an elongate microstructure extending from the polymer membrane, and a hydrogel coupled to at least a portion of the elongate microstructure, wherein the hydrogel and the elongate microstructure are arranged to cooperate to cause a displacement of the polymer membrane in response to a fluid flowing and interacting with the sensor, and wherein the sensor is configured to provide a measurement indicative of a flow parameter of the fluid based on the displacement of the polymer membrane. According to further embodiments of the present invention, a method for forming a sensor and a method of controlling a sensor are also provided.

Dependencies are inferred from the claim text.