Method of forming a non-uniform write gap perpendicular writer for shingle writing
AssigneeHeadway Technologies, Inc.
InventorLijie Guan
Life of this patent
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Abstract
A method of forming a PMR writer is disclosed wherein at least one of a recessed center section in the write pole trailing edge and a center recessed trailing shield is used to improve the field gradient at track edge. In all embodiments, there is a non-uniform write gap formed between the trailing edge and the trailing shield. The recessed portion of the write pole trailing edge and/or center recess of the trailing shield has a thickness from 10 to 40 nm in a down-track direction and a width in a cross-track direction of 20 to 200 nm. The distance between the center recess and a corner of the trailing edge is from 20 to 80 nm. A sequence of steps is provided to fabricate the two embodiments of the present invention.
Claims4
A method of forming a PMR writer for shingle writing, comprising:
- (a) providing a substrate having a top surface formed thereon;
- (b) forming a write pole having a top surface that is a trailing edge, a bottom surface that is a leading edge, and two sides connecting the trailing and leading edges within a first dielectric layer on said substrate, said top surface is formed coplanar with a top surface of said first dielectric layer;
- (c) depositing a second dielectric layer on the trailing edge and on the first dielectric layer and forming a planar top surface on the second dielectric layer;
- (d) selectively depositing a third dielectric layer that contacts a top surface of the second dielectric layer above the trailing edge, said second and third dielectric layers form a non-uniform write gap layer wherein a top surface of the third dielectric layer is formed a greater distance from the trailing edge than a top surface of said second dielectric layer;
- e) forming a side gap adjoining each side of the write pole by etching portions of the first and second dielectric layers wherein each side gap has a side that is substantially parallel to the nearest write pole side, said etching forms a top surface of the write gap layer comprising two end sections that are parallel to the substrate and a center section with a single arc shape which includes the top surface of the third dielectric layer;
- and
- (f) depositing a magnetic layer on the write gap and adjacent to each side gap to form two side shields that are connected by a trailing shield.
Dependencies are inferred from the claim text.