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US 9,738,483 B2Granted
Tape sticking apparatus and tape sticking method
AssigneesEbara Corporation, Is Engineering Co., Ltd.
InventorsKenya Ito, Keisuke Uchiyama, Tomiichi Matsui, Mahito Shibuya
Life of this patent
Estimating the term…
Abstract
A tape sticking apparatus for sticking a masking tape for protecting a peripheral portion of a substrate, such as a wafer, is disclosed. The tape sticking apparatus includes: a substrate holder configured to hold and rotate a substrate; and a tape sticking unit configured to stick a masking tape onto a peripheral portion of the substrate held on the substrate holder.
Claims16
A tape sticking method comprising:
- sticking a masking tape onto a peripheral portion of a substrate while rotating the substrate by
- pressing the masking tape against a peripheral side surface of the substrate while rotating the substrate;
- bending the masking tape, which has been pressed against the peripheral side surface of the substrate, along a longitudinal direction of the masking tape by a first roller and sticking a bent portion of the masking tape onto an upper surface of the peripheral portion of the substrate by the first roller while rotating the substrate and while forcing the first roller against the bent portion of the masking tape at a pressing force controlled by a moving device coupled to the first roller;
- and
- bending the masking tape, which has been pressed against the peripheral side surface of the substrate, along the longitudinal direction of the masking tape by a second roller and sticking a bent portion of the masking tape onto a lower surface of the peripheral portion of the substrate by the second roller while rotating the substrate and while forcing the second roller against the bent portion of the masking tape at a pressing force controlled by the moving device coupled to the second roller.
2 more elements
A tape sticking apparatus comprising:
- a substrate holder configured to hold and rotate a substrate;
- and
- a tape sticking unit configured to stick a masking tape onto a peripheral portion of the substrate held on the substrate holder, wherein the tape sticking unit includes:
- a side roller configured to press the masking tape against a peripheral side surface of the substrate;
- a first roller configured to bend the masking tape, which has been pressed against the peripheral side surface of the substrate, along a longitudinal direction of the masking tape and stick a bent portion of the masking tape onto an upper surface of the peripheral portion of the substrate;
- a second roller configured to bend the masking tape, which has been pressed against the peripheral side surface of the substrate, along the longitudinal direction of the masking tape and stick a bent portion of the masking tape onto a lower surface of the peripheral portion of the substrate;
- and
- a moving device coupled to the first roller and the second roller and configured to move the first roller and the second roller in directions closer to and away from each other.
5 more elements
Dependencies are inferred from the claim text.