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US 9,733,543 B2Granted
Sub-volt drive 100 GHz bandwidth electro-optic modulator
AssigneeThe Regents of the University of California
InventorNadir Dagli
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Abstract
Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers.
Claims22
An electro-optical modulator comprising:
- a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer;
- and
- a coplanar waveguide, wherein
- signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers.
1 more element
A method of fabricating an electro-optical modulator comprising:
- forming a Mach-Zehnder interferometer in a substrate removed semiconductor layer;
- and
- forming a coplanar waveguide overlaying the Mach-Zehnder interferometer, wherein
- signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers.
1 more element
Dependencies are inferred from the claim text.