Shape measuring apparatus, structure manufacturing system, stage apparatus, shape measuring method, structure manufacturing method, program, and recording medium
AssigneeNikon Corporation
InventorToru Aramaki
Life of this patent
Estimating the term…
Abstract
Provided is a shape measuring apparatus that is capable of suppressing adverse effects on measurement accuracy. A probe is provided with an illumination optical system that irradiates an object with light and an image capturing device that detects light reflected by the object. A rotation mechanism that rotates the probe is disposed at a position distanced from a rotation axis line. Attitude of the probe) relative to the object can be changed in accordance with the rotation of the probe. Signals detected by the image capturing device are calculated by a shape information acquisition unit.
Claims24
A shape measuring apparatus configured to measure a shape of a subject, the apparatus comprising:
- a probe including an irradiating optical system configured to irradiate the subject with light and an imaging element configured to detect light with which the subject is irradiated and which is reflected by the subject;
- a rotator configured to rotate the probe around the subject with the probe distanced from a rotation axis of the rotator;
- a holder disposed at a distance from a rotation axis of the rotator, the holder holding the probe and changing an attitude of the probe relative to the subject in accordance with the rotation of the probe;
- a calculator configured to calculate shape information of the subject using a signal detected from the imaging element using the probe;
- and
- a corrector configured to correct the shape information of the subject based on a deformation of the holder.
A stage system used in a shape measuring apparatus that measures a shape of a subject, the stage system comprising:
- a stage apparatus including:
- a rotator configured to cause a probe to rotate around the subject with the probe distanced from a rotation axis of the rotator, the probe including an irradiating optical system configured to irradiate the subject with light and an imaging element configured to detect light with which the subject is irradiated and which is reflected by the subject;
- and
- a holder disposed at a distance from a rotation axis of the rotator, the holder holding the probe and changing an attitude of the probe relative to the subject in accordance with the rotation of the probe;
- and
- a corrector configured to correct shape information of the subject on the basis of deformation of the holder,
- wherein a signal from the imaging element is detected using the probe, and
- wherein shape information of the subject is acquired using the detected signal.
A shape measuring method of measuring a shape of a subject, comprising:
- irradiating the subject with light emitted from a probe, receiving light reflected by the subject using an imaging element, detecting a signal from the imaging element using the probe, and acquiring shape information of the subject using the detected signal, the probe including an irradiating optical system configured to irradiate the subject with the light and the imaging element configured to detect the light with which the subject is irradiated and which is reflected by the subject;
- changing an attitude of the probe relative to the subject in accordance with rotation of the probe, the probe being held by a holder at a position distanced from a rotation axis on which the probe is rotated around the subject;
- rotating a probe around a subject using a rotator, with the probe distanced from a rotation axis of the rotator;
- and
- correcting shape information of the subject on the basis of deformation of the holder.
A non-transitory computer readable medium storing a program causing a computer to execute a method, the method comprising:
- controlling, by the computer, a shape measurement apparatus including:
- a probe including an irradiating optical system configured to irradiate the subject with light and an imaging element configured to detect light with which the subject is irradiated and which is reflected by the subject;
- a rotator configured to rotate the probe around the subject;
- a holder disposed at a distance from a rotation axis of the rotator, the holder holding the probe and changing an attitude of the probe relative to the subject in accordance with the rotation of the probe;
- rotating a probe around a subject with the probe distanced from a rotation axis of the rotator;
- detecting a signal from the imaging element using the probe;
- acquiring shape information of the subject using the detected signal;
- and
- correcting the shape information of the subject on the basis of deformation of the holder.
Dependencies are inferred from the claim text.