Process for producing fluoride gas
AssigneeStella Chemifa Corporation
InventorsMasahide Waki, Tatsuhiro Yabune, Kazuhiro Miyamoto, Kazutaka Hirano
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Abstract
Disclosed is a process for producing a fluoride gas that can produces fluoride gases such as BF3, SiF4, GeF4, PF5 or AsF5 at a reduced production cost in a simple manner. The process is characterized in that a compound containing an atom, which, together with a fluorine atom, can form a polyatomic ion, is added to a hydrogen fluoride solution to produce the polyatomic ion in a hydrogen fluoride solution and to evolve a fluoride gas comprising the fluorine atom and the atom that, together with the fluorine atom, can form a polyatomic ion.
Claims5
A process for producing a fluoride gas, comprising:
- adding a compound, which contains an atom that is combined with a fluorine atom or an atom that can be combined with a fluorine atom to form a polyatomic ion, to a hydrogen fluoride solution, so as to produce the polyatomic ion in the hydrogen fluoride solution, and
- generating the fluoride gas that comprises the fluorine atom and the atom, which can be combined with the fluorine atom to form the polyatomic ion, wherein
- the compound contains an organic fluoride complex salt.
Dependencies are inferred from the claim text.