Differential pressure sensor with a capacitive read out system

A differential pressure sensor, comprising:

• a cavity having a base including a base electrode and a first membrane suspended above the base which includes a membrane electrode, wherein the first membrane is sealed with the first membrane;
• a first pressure input port coupled to the space above the sealed first membrane;
• a capacitive read out system for measuring the capacitance between the base electrode and membrane electrode;
• an interconnecting channel between the cavity and a second pressure input port;
• and
• a second cavity to the side of the cavity, with the cavity and the second cavity interconnected by the interconnection channel, wherein the second cavity comprises a second membrane which has at least one opening, wherein the at least one opening is coupled to the second pressure input port, wherein the second cavity has a base including a second base electrode and the second membrane includes a second membrane electrode, and wherein the capacitive read out system is for measuring the capacitance between the base electrode and membrane electrode and for measuring the capacitance between the second base electrode and the second membrane electrode.