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US 9,725,800 B2Granted
Vaporizing system
AssigneeKabushiki Kaisha Toshiba
InventorsMari Kusunoki, Shinji Miyazaki
Life of this patent
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Abstract
According to one embodiment, a vaporizing system comprises first and second tanks that can accumulate liquid source and first, second, and third pipes. The first pipe allows first gas to be sent out of the first tank. The second pipe allows second gas to be sent out of the second tank. The third pipe is connected to the first and second pipes and allows the first and second gas to be sent out to an external apparatus. The first tank is placed on an upper side of the second tank in a stacked manner.
Claims20
A vaporizing system comprising:
- a first tank that can accumulate liquid source;
- a second tank that can accumulate the liquid source;
- a first pipe to send first gas generated by the liquid source vaporizing in the first tank out of the first tank therethrough;
- a second pipe to send second gas generated by the liquid source vaporizing in the second tank out of the second tank therethrough;
- a third pipe connected to the first and second pipes and to send out the first and second gas to an external apparatus therethrough,
- a third tank that can accumulate the liquid source;
- and
- a fourth pipe to send third gas generated by the liquid source vaporizing in the third tank out of the third tank therethrough,
- wherein the first tank is placed on an upper side of the second tank in a stacked manner,
- the third pipe is connected to the fourth pipe and allows the first to third gas to be sent out to the external apparatus therethrough, and
- the second tank is placed on an upper side of the third tank in a stacked manner.
8 more elements
A vaporizing system comprising:
- a first tank that can accumulate liquid source;
- a second tank that can accumulate the liquid source;
- a first pipe to send first gas generated by the liquid source vaporizing in the first tank out of the first tank therethrough;
- a second pipe to send second gas generated by the liquid source vaporizing in the second tank out of the second tank therethrough;
- a third pipe connected to the first and second pipes and to send out the first and second gas to an external apparatus therethrough,
- a seventh pipe placed on an upper side of the first tank and to dribble the liquid source from a feeding device supplying the liquid source into the first tank therethrough;
- a third liquid level detecting unit that detects a liquid surface height of the liquid source in the first tank;
- a fourth valve placed in the seventh pipe;
- and
- a third check valve placed in the first tank,
- wherein the first tank is placed on an upper side of the second tank in a stacked manner, and
- when the third check valve is closed, and the third liquid level detecting unit detects that a liquid level of the liquid source has reached a tenth predetermined height, the fourth valve stops the supply of the liquid source from the feeding device to the first tank.
9 more elements
A vaporizing system comprising:
- a first tank that can accumulate liquid source;
- a second tank that can accumulate the liquid source;
- a first pipe to send first gas generated by the liquid source vaporizing in the first tank out of the first tank therethrough;
- a second pipe to send second gas generated by the liquid source vaporizing in the second tank out of the second tank therethrough;
- a third pipe connected to the first and second pipes and to send out the first and second gas to an external apparatus therethrough;
- a seventh pipe placed on an upper side of the first tank and to dribble the liquid source from a feeding device supplying the liquid source into the first tank therethrough;
- and
- a third check valve placed in the first tank,
- wherein the first tank is placed on an upper side of the second tank in a stacked manner, and
- when a liquid level of the liquid source in the first tank reaches a ninth predetermined height, the third check valve blocks the seventh pipe to stop the supply of the liquid source from the feeding device to the first tank while preventing the liquid source from flowing backward from the first tank into the seventh pipe.
7 more elements
Dependencies are inferred from the claim text.