Vacuum variable capacitor
AssigneeComet AG
InventorsMark Joachim Mildner, Roland Bieri, Mike Abrecht, Walter Bigler, Douglas Beuerman, Jack Gilmore
Life of this patent
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Abstract
A vacuum variable capacitor includes a pre-vacuum enclosure for reducing a pressure differential across the bellows, wherein a drive is disposed outside the enclosures of the vacuum variable capacitor. The vacuum force load on the drive system can thereby be reduced, allowing faster movement of the movable electrode, faster capacitance adjustment of the vacuum variable capacitor and longer lifetimes of the device.
Claims13
A vacuum variable capacitor adjustable between a minimum capacitance value and a maximum capacitance value, the vacuum variable capacitor comprising:
- a first vacuum enclosure containing capacitor electrodes separated by a vacuum dielectric, the wall of the first vacuum enclosure comprising a first deformable region, hereafter referred to as first bellows, for transferring mechanical movement between a drive means and a mobile one of the capacitor electrodes inside the first vacuum enclosure,
- a second enclosure, referred to hereafter as the pre-vacuum enclosure, containing a gas at a predetermined pressure, wherein the first bellows separates the gas in the pre-vacuum enclosure from the vacuum dielectric in the first vacuum enclosure, and
- wherein the drive means is disposed outside the first and the second enclosure of the vacuum variable capacitor, the drive means is coupled to a driven means by a magnetic coupling, and the magnetic coupling comprises a shielding to be shielded from electromagnetic fields.
Dependencies are inferred from the claim text.