Reactive-species supply device and surface treatment apparatus
AssigneesFuji Machine Mfg. Co., Ltd., National University Corporation Nagoya University
InventorsMasaru Hori, Hiroyuki Kano, Tetsunori Kawasumi, Naofumi Yoshida, Akihiro Kawajiri, Toshimitsu Watanabe, Joji Isozumi
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Abstract
A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
Claims10
A reactive-species supply device configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object, said reactive-species supply device comprising:
- a main body;
- at least one pair of electrodes having an elongated shape;
- and
- an electrode protection device configured to protect said electrodes from the treatment gas, wherein
- each of said at least one pair of electrodes consists of two electrodes that are held by said main body, such that said two electrodes are spaced apart from each other in a width direction of said main body, and such that said two electrodes are parallel to each other,
- said electrode protection device includes electrode covers that are held by said main body, such that each of said electrodes is covered at an outer circumferential surface thereof by a corresponding one of said electrode covers, each of said electrode covers having a cylindrical shape,
- each adjacent two of said electrode covers have:
- (i) a top portion having an opening through which a respective electrode extends in a lengthwise direction, along an x-axis, away from the main body;
- and (ii) respective electric-discharge openings provided in respective side portions of each adjacent two of said electrode covers, the respective electric-discharge openings being opposed to each other in said width direction, along a y-axis, and
- said electric discharge space is defined between the respective side portions of each of said at least one pair of electrodes.
Dependencies are inferred from the claim text.