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US 9,712,128 B2Granted
Microelectromechanical resonator
AssigneeSiTime Corporation
InventorsJoseph C. Doll, Nicholas Miller, Charles I. Grosjean, Paul M. Hagelin, Ginel C. Hill
Life of this patent
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Abstract
In a MEMS device having a substrate and a moveable micromachined member, a mechanical structure secures the moveable micromachined member to the substrate, thermally isolates the moveable micromachined member from the substrate and provides a conduction path to enable heating of the moveable micromachined member to a temperature of at least 300 degrees Celsius.
Claims10
A microelectromechanical system (MEMS) resonator comprising:
- a layer of degenerately-doped polycrystalline silicon;
- a layer of degenerately-doped single-crystal silicon;
- and
- a layer of piezoelectric material sandwiched between the degenerately-doped polycrystalline silicon layer and the degenerately-doped single-crystal silicon layer.
1 more element
Dependencies are inferred from the claim text.