Superheated steam recycling apparatus and method for using same

A method for using a superheated steam recycling apparatus that comprises:

• a superheated steam generating part that generates superheated steam;
• a steam supply flow path for supplying saturated steam or superheated steam to the superheated steam generating part;
• a superheated steam utilization part that is supplied with the superheated steam generated by the superheated steam generating part and thermally processes a processing object with the superheated steam;
• a steam return flow path for returning used steam having passed through the superheated steam utilization part to the superheated steam generating part;
• and
• a flowmeter that is provided in the steam return flow path to measure a flow rate of the used steam returned to the superheated steam generating part, the method comprising:
• controlling a flow rate of the saturated steam or the superheated steam to be supplied to the superheated steam generating part through the steam supply flow path on the basis of a difference between a desired flow rate of the superheated steam to be generated by the superheated steam generating part and the flow rate of the used steam obtained by the flowmeter.