US 9,702,036 B2 · Layer system with at least one mixed crystal layer of a multi-oxide

Abstract

A PVD layer system for the coating of workpieces encompasses at least one mixed-crystal layer of a multi-oxide having the following composition: (Me11-xMe2x)2O3, where Me1 and Me2 each represent at least one of the elements Al, Cr, Fe, Li, Mg, Mn, Nb, Ti, Sb or V. The elements of Me1 and Me2 differ from one another. The crystal lattice of the mixed-crystal layer in the PVD layer system has a corundum structure which in an x-ray diffractometrically analyzed spectrum of the mixed-crystal layer is characterized by at least three of the lines associated with the corundum structure. Also disclosed is a vacuum coating method for producing a mixed-crystal layer of a multi-oxide, as well as correspondingly coated tools and components.

Claims28

Dependent claims

A vacuum coating method for producing a mixed-crystal layer of a multi-oxide on a workpiece, comprising the steps of:

depositing a coating on the workpiece with a first arc- or sputtering-source electrode, constituting an alloy target, and a second electrode in an oxygenous process-gas atmosphere;
and
simultaneously feeding said source electrode with a direct current or direct voltage as well as a pulsed or alternating current or a pulsed or alternating-current voltage,
characterized in that composition of the alloy target essentially corresponds to that of the mixed-crystal layer and that the latter is deposited with a corundum structure by arc evaporating the alloy target,
wherein said mixed-crystal layer of said multi-oxide comprises areas of at least one element of said alloy target.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

13/080,779Filed 6 Apr 2011 · division

Priority

11 Oct 2006

Published

US 2011/0183084 A128 Jul 2011

Granted

11 Jul 2017

Term ends

Not estimatedThe source records don’t support an estimate.

Classification15 codes

C23C 14/027
Pretreatment of the material to be coated: graded interfaces
B29C 33/56
Moulds or cores; Details thereof or accessories therefor: coatings , e.g. enameled or galvanised; Releasing, lubricating or separating agents
C23C 14/0021
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material: reactive sputtering or evaporation
C23C 14/022
Cleaning or etching treatments: by means of bombardment with energetic particles or radiation

Layer system with at least one mixed crystal layer of a multi-oxide

Life of this patent

Layer system with at least one mixed crystal layer of a multi-oxide

Life of this patent

Abstract

Claims28