Fine concavo-convex structure product, heat-reactive resist material for dry etching, mold manufacturing method and mold

A method of manufacturing a fine concavo-convex structure product provided with an etching layer and a resist layer including a heat-reactive resist material for dry etching provided on the etching layer, said method comprising:

• selecting said heat-reactive resist material, for dry etching, out of at least one species from a group consisting of Cr, Fe, Co, Al, Ga, In, Hf, Pb, oxides thereof and nitrides thereof;
• forming openings in said resist layer by exposure;
• forming concave portions corresponding to said openings in said etching layer by dry etching, thereby forming a fine pattern of a concavo-convex structure,
• wherein a pattern pitch P of said fine pattern of said concavo-convex structure ranges from 1nm to 10 μm,
• wherein a cross-sectional shape of said concave portions is a trapezoid or a triangle, and
• wherein when said dry etching is carried out, side surfaces of said concave portions of said concavo-convex structure of said etching layer are coated with fluorocarbons while forming a taper surface on said side surfaces due to a side wall protection effect produced by said fluorocarbons while maintaining a predetermined opening width of said openings in said resist layer.