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AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorsStefan Lanio, Aleksandra Kramer, John Breuer
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An electron beam device for inspecting a sample with an electron beam is described. The electron beam device includes an electron beam source including a thermal field emitter, which includes an emitter tip having an emission facet configured for electron emission, wherein the emission facet has an emission facet width; and a first side facet and a second side facet, wherein an edge facet is formed between the first side facet and the second side facet, which has an edge facet width. The edge facet width is between 20% and 40% of the emission facet width. The electron beam source further includes an extractor device; and a heating device for heating the thermal field emitter. The electron beam device further includes electron beam optics and a detector device for detecting secondary charged particles generated at an impingement or hitting of the primary electron beam on the sample.
An electron beam device for inspecting a sample with an electron beam, the electron beam device including an optical axis, the electron beam device comprising:
A thermal field emitter for emitting an electron beam in an electron beam device, the thermal field emitter comprising:
Method for producing an emitter tip for a thermal field emitter for a source of an electron beam, comprising
A method for operating an electron beam device, comprising:
Dependencies are inferred from the claim text.