Fluid delivery system and method
AssigneeEntegris, Inc.
InventorsJordan Hodges, Richard D. Chism, Mitchell W. McFeron, Donald D. Ware, Glenn M. Tom
Life of this patent
Estimating the term…
Abstract
A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.
Claims7
A method of delivering fluid for use thereof, the method comprising:
- activating a vacuum source to draw fluid from at least one bulk canister into a transfer vessel;
- supplying a first gas to the transfer vessel to drive said fluid from the transfer vessel into a process canister;
- and
- supplying a second gas to the process canister to deliver the fluid from the process canister to a location of use,
- wherein the second gas supplied to the process canister is at a lower pressure than the first gas supplied to the transfer vessel.
Dependencies are inferred from the claim text.