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US 9,694,319 B2Granted
Gas purifier
AssigneeEntegris, Inc.
InventorsAbneesh Srivastava, Thomas Richard Gaffney, Joshua T. Cook, Peter K. Shogren, Daimhin Paul Murphy, Stenio da Costa Pereira
Life of this patent
Estimating the term…
Abstract
The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.
Claims20
A gas purifier, comprising:
- a housing having a fluid inlet and a fluid outlet, the inlet and outlet fluidly connected through a purifier bed contained in the housing that removes moisture and oxygen from an inert gas and from a reducing gas, the purifier bed comprising:
- a first bed of material comprising macropore mass transfer limited molecular sieves that remove moisture from the inert gas and the reducing gas, the molecular sieves having a particle size of 0.7 millimeters±20 percent;
- and
- a second bed of material comprising a metal catalyst on a support that removes oxygen from the inert gas and the reducing gas, the metal catalyst being at least partially regenerated to a reduced form by the reducing gas at room temperature.
1 more element
Dependencies are inferred from the claim text.