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US 9,691,997 B2Granted
Devices having dielectric layers with thiosulfate-containing polymers
AssigneeEastman Kodak Company
InventorsDeepak Shukla, Kevin M. Donovan
Life of this patent
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Abstract
A semiconductor device can be prepared with a gate dielectric layer that comprises: (1) a photochemically or thermally crosslinked product of a photocurable or thermally curable thiosulfate-containing polymer that has a Tg of at least 50° C. and that comprises: an organic polymer backbone comprising (a) recurring units comprising pendant thiosulfate groups; and further comprises charge balancing cations, and (2) optionally, an electron-accepting photosensitizer component.
Claims14
A device comprising a gate dielectric layer that comprises:
- (1) a photochemically crosslinked product derived from a photocurable curable thiosulfate-containing polymer that has a Tg of at least 50° C.,
- wherein the photocurable thiosulfate-containing polymer comprises:
- an organic polymer backbone that comprises at least one repeating unit comprising:
- (a) recurring units comprising pendant thiosulfate groups;
- and the photocurable thiosulfate-containing polymer further comprises, either within the (a) recurring units or within recurring units different from the (a) recurring units, charge balancing cations, and wherein the photocurable thiosulfate-containing polymer has sensitivity to irradiation at a wavelength of from 150 nm to 700 nm to cause the pendant thiosulfate groups to form disulfide bonds, and
- (2) optionally, an electron-accepting photosensitizer component.
3 more elements
A device comprising:
- a substrate,
- a gate electrode disposed over the substrate,
- a gate dielectric layer,
- a thin film of a semiconductor material adjacent the gate dielectric layer, and
- a source electrode and a drain electrode contiguous to the thin film of the semiconductor material,
- wherein the gate dielectric layer comprises a crosslinked disulfide polymer product that is derived from a precursor dielectric composition comprising:
- (1) a photochemically crosslinked product derived from a photocurable curable thiosulfate-containing polymer that has a Tg of at least 50° C.,
- wherein the photocurable thiosulfate-containing polymer comprises:
- an organic polymer backbone that comprises at least one repeating unit comprising:
- (a) recurring units comprising pendant thiosulfate groups;
- and the photocurable thiosulfate-containing polymer further comprises, either within the (a) recurring units or within recurring units different from the (a) recurring units, charge balancing cations, and wherein the photocurable thiosulfate-containing polymer has sensitivity to irradiation at a wavelength of from 150 nm to 700 nm to cause the pendant thiosulfate groups to form disulfide bonds, and
- (2) optionally, an electron-accepting photosensitizer component.
9 more elements
Dependencies are inferred from the claim text.