Method of treating a cleanroom enclosure
AssigneeParticle Measuring Systems, Inc.
InventorsGerald Gromala, Ronald W. Adkins, Gilberto Dalmaso, Brian A. Knollenberg, Daniel Rodier
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Abstract
This invention is in the field of systems and methods for controlling contamination in high purity environments. This invention relates generally to particulate filtering and treatment of molecular contamination and process gases in enclosures, such as cleanrooms, contamination controlled manufacturing environments, mini-environments, isolators, glove boxes and restricted air barrier systems (RABS). The invention is capable of chemically transforming molecular contamination and process gases into less reactive or inert reaction products while at the same time decreasing the level of biological and nonbiological particulates.
Claims23
A method of treating a cleanroom enclosure, the method comprising the steps of:
- providing said cleanroom enclosure;
- and
- flowing gas from within said cleanroom enclosure through an active filtration system or flowing gas through said active filtration system into said cleanroom enclosure, wherein said active filtration system decomposes one or more of molecular contaminants, particulate contaminants and process gases present in said gas into reaction products and reduces the abundance of particles present in said gas.
A method of reducing a concentration of one or more sterilant process gases contained within a cleanroom enclosure, the method comprising the steps of:
- providing said cleanroom enclosure containing said one or more sterilant process gases;
- and
- flowing gas from within said cleanroom enclosure through an active filtration system, wherein said active filtration system decomposes said one or more sterilant process gases present in said gas to reaction products, inactivates biological particles present in said gas, and filters particles present in said gas.
A method for controlling the gas composition within a cleanroom enclosure for the manufacture of electronics or optical systems, the method comprising the steps of:
- providing said enclosure for the manufacture of electronics or optical systems;
- and
- flowing gas from within said cleanroom enclosure through an active filtration system or flowing gas through an active filtration system into said cleanroom enclosure, wherein said active filtration system decomposes one or more volatile organic compounds or refractory compounds present in said gas to reaction products and filters particles present in said gas.
Dependencies are inferred from the claim text.