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US 9,672,849 B2Granted
Multiple reader stacks disposed in close proximity
AssigneeSeagate Technology LLC
InventorsMark T. Kief, Thomas Roy Boonstra
Life of this patent
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Abstract
In accordance with one embodiment, a multi-reader can be manufactured so as to be able to read from multiple regions of a storage device contemporaneously during operation. Such a device can be configured, for example, by forming a first wall; forming a second wall; and utilizing the first wall and the second wall to form two adjacent reader stacks.
Claims17
A method of forming two adjacent reader stacks comprising:
- depositing a mandrel material on a hardmask layer, the mandrel material having a first sidewall and a second sidewall;
- covering the mandrel material with a conformal coat, the conformal coat forming a first wall on the first sidewall of the mandrel material and a second wall on the second sidewall of the mandrel material;
- removing the mandrel material to retain the first and second walls;
- removing hardmask material of the hardmask layer, a portion of the hardmask material of the hardmask layer retained under the first and second walls to form a wall structure including the hardmask material and the first wall and the second wall of the conformal coat;
- and
- etching the wall structure to form a first and a second reader stack of the two adjacent reader stacks.
3 more elements
Dependencies are inferred from the claim text.