Resonator electrode shields
AssigneeSiTime Corporation
InventorsDavid Raymond Pedersen, Aaron Partridge, Thor Juneau
Life of this patent
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Abstract
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.
Claims20
A microelectromechanical system (MEMS) resonator comprising:
- a resonant semiconductor structure;
- a first drive electrode to generate a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically;
- a first sense electrode to generate a timing signal in response to the mechanical resonance of the resonant semiconductor structure;
- and
- a first electrically conductive shielding structure disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.
A method of operation within a microelectromechanical system (MEMS) resonator having a resonant semiconductor structure, the method comprising:
- generating a time-varying electrostatic force at a first drive electrode to cause the resonant semiconductor structure to resonate mechanically;
- generating a timing signal within a first sense electrode in response to the mechanical resonance of the resonant semiconductor structure;
- and
- shielding the first sense electrode from electric field lines emanating from the first drive electrode via a conductive shielding structure disposed between the first drive electrode and the first sense electrode.
A method of fabricating a microelectromechanical system (MEMS) resonator, the method comprising:
- forming a resonant semiconductor structure, a first drive electrode adjacent the resonant semiconductor structure, and a first sense electrode adjacent the resonant semiconductor structure;
- and
- disposing a first electrically conductive shielding structure between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode during operation of the MEMS resonator.
Dependencies are inferred from the claim text.