Integrated on chip detector and zero waveguide module structure for use in DNA sequencing

An apparatus for single molecule real time DNA sequencing, said apparatus comprising:

• a semiconductor substrate comprising a first region and an adjoining second region, wherein at least one photodetector is present in said first region of said semiconductor substrate and located on a portion of a sub-surface of said semiconductor substrate, and wherein a plurality of semiconductor devices is present in said second region of said semiconductor substrate and located on a topmost surface of said semiconductor substrate;
• a dielectric material laterally surrounding said at least one photodetector and located directly on exposed portions of said sub-surface of said semiconductor substrate;
• a contact wire located on a surface of said dielectric material and contacting a topmost surface of said at least one photodetector and a portion of one of said semiconductor devices;
• an interconnect structure located above said first region and said second region of said semiconductor substrate, said contact wire and said plurality of semiconductor devices;
• a metal layer located above a topmost surface of said interconnect structure, wherein said metal layer has an opening that provides a zero waveguide module located above said first region of said semiconductor substrate;
• a DNA polymerase located at a bottom of said opening that provides said zero waveguide module;
• and
• a light source located beneath said first region of said semiconductor substrate.