Methods for making radially anisotropic thin-film magnetic torroidal cores
AssigneeTrustees of Dartmouth College
InventorsJizheng Qiu, Charles R. Sullivan
Life of this patent
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Abstract
A method of forming a radially anisotropic toroidal magnetic core includes providing apparatus having a first magnet for providing a radial magnetic field extending across a cavity from an axial spindle to a surrounding second magnetic element, placing a substrate in the cavity, the substrate having a hole fitting around the head of the spindle; and sputter-depositing a film of ferromagnetic material onto the substrate. In an embodiment, the spindle is magnetically coupled to a first pole of the first magnet, the second magnetic element is coupled to a second pole of the first magnet, and a thermally conductive, nonmagnetic, insert separates the spindle and the second magnetic element.
Claims10
A method of fabricating a core having a radial aniosotropy, the method comprising
- providing an apparatus for providing a radial magnetic field comprising
- a first magnet for providing the magnetic field, the magnetic field extending from an axial spindle of the apparatus to a surrounding second magnetic element,
- placing a substrate in a region subject to magnetic fields extending from the spindle to the second magnetic element;
- and
- depositing a film of aniosotropic ferromagnetic material onto the substrate;
- wherein the apparatus for providing a radial magnetic field comprises the axial spindle formed of magnetic material, the axial spindle being magnetically coupled to a first pole of the first magnet, the spindle axial having a head opposite the first magnet, the head having a diameter greater than a diameter of an intermediate section of the axial spindle disposed between the magnet and the head;
- and wherein the second magnetic element is coupled to a second pole of the first magnet;
- and
- a thermally conductive, nonmagnetic, insert disposed between the intermediate section of the axial spindle and the second magnetic element.
Dependencies are inferred from the claim text.