Piezoelectric oriented ceramics and method of manufacturing the same
AssigneesMurata Manufacturing Co., Ltd., National Institute for Materials Science
InventorsYasunari Miwa, Shinichiro Kawada, Masahiko Kimura, Tohru Suzuki, Tetsuo Uchikoshi, Yoshio Sakka
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Abstract
Piezoelectric oriented ceramics containing a Pb(Ti, Zr)O3-based compound having a high degree of orientation not lower than 0.64, which was calculated with the Lotgering method based on an X-ray diffraction pattern in a prescribed cross-section thereof, and having a sintered density not lower than 85% of a theoretical density.
Claims5
Piezoelectric oriented ceramics mainly composed of a Pb(Ti,Zr)O3-based compound having a perovskite structure, having a degree of orientation not lower than 0.64, which is calculated with Lotgering method based on an X-ray diffraction pattern in a prescribed cross-section thereof, and having a sintered density not lower than 85% of a theoretical density, wherein single crystal particles forming said piezoelectric oriented ceramics are spherical.
A method of manufacturing piezoelectric oriented ceramics having a degree of orientation not lower than 0.64, which is calculated with Lotgering method based on an X-ray diffraction pattern in a prescribed cross-section thereof, the method comprising:
- preparing single crystal powders containing a Pb(Ti,Zr)O3-based compound having a perovskite structure;
- fabricating a slurry containing said single crystal powders as a dispersion phase;
- obtaining a compact by forming said slurry in a magnetic field;
- and
- firing said compact for 24 hours or longer at a temperature lower by at least 100° C. than a firing temperature at which a sintered density is not lower than 85% of a theoretical density when firing for 3 hours;
- wherein single crystal particles forming said piezoelectric oriented ceramics are spherical.
Dependencies are inferred from the claim text.