Multilayer X-ray source target with high thermal conductivity
AssigneeGeneral Electric Company
InventorsGeorge Theodore Dalakos, Mark Alan Frontera, Vance Scott Robinson, William Robert Ross, Xi Zhang
Life of this patent
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Abstract
In various embodiments, a multi-layer X-ray source target is provided having two or more layers of target material at different depths and different thicknesses. In one such embodiment the X-ray generating layers increase in thickness in relationship to their depth relative to the electron beam facing surface of the source target, such that X-ray generating layer further from this surface are thick than X-ray generating layers closer to the electron beam facing surface.
Claims14
An X-ray source, comprising:
- an emitter configured to emit an electron beam;
- and
- a target having an emitter-facing surface and configured to generate X-rays when impacted by the electron beam, the target comprising:
- two or more X-ray generating layers at different depths relative to the emitter-facing surface, each X-ray generating layer having a different thickness;
- and
- at least one intervening thermally-conductive layer between each pair of X-ray generating layers;
- wherein the X-ray generating layers further from the emitter-facing surface are thicker than X-ray generating layers nearer the emitter-facing surface.
A method for fabricating an X-ray source target, comprising:
- forming a first X-ray generating layer, wherein the first X-ray generating layer has a first thickness;
- on the first X-ray generating layer, forming one or more sets of:
- an intervening thermally-conductive layer;
- and
- an additional X-ray generating layer, wherein each X-ray generating layer has a different thickness than other X-ray generating layers;
- wherein each additional X-ray generating layer formed over the first X-ray generating layer is less thick than those X-ray generating layers formed prior.
Dependencies are inferred from the claim text.