Back to results
US 9,645,028 B2Granted
Resistive pressure sensor including piezo-resistive electrode
AssigneeSamsung Electronics Co., Ltd.
InventorsChwee Lin Choong, Jongjin Park, Jihyun Bae, Byoungsun Lee, Jungkyun Im
Life of this patent
Estimating the term…
Abstract
Provided is a pressure sensor including an elastic thin film including a first surface and a second surface that face each other, the elastic thin film including an elastomer material, a plurality of protruding deformable structures patterned on the first surface; a piezoresistive electrode formed along surfaces of the plurality of protruding deformable structures; and a counter electrode disposed to face the piezoresistive electrode.
Claims20
A pressure sensor comprising:
- an elastic thin film comprising a first surface and a second surface that face each other, the elastic thin film comprising an elastomer material, and the first surface being patterned to have a plurality of protruding deformable structures;
- a piezoresistive electrode formed along surfaces of the plurality of protruding deformable structures, the piezoresistive electrode being shaped to protrude in accordance with a shape of the plurality of protruding deformable structures;
- and
- a counter electrode disposed to face the piezoresistive electrode,
- wherein the piezoresistive electrode protrudes toward the counter electrode, and
- wherein as pressure applied to the counter electrode becomes stronger, a contact area between the piezoresistive electrode and the counter electrode becomes larger.
3 more elements
Dependencies are inferred from the claim text.