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US 9,641,949 B2Granted
MEMS device and method for manufacturing the MEMS device
AssigneeInfineon Technologies AG
InventorJohann Massoner
Life of this patent
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Abstract
A MEMS device and a method for manufacturing a MEMS device are disclosed. In an embodiment the MEMS device comprises a support having a cavity therethrough and a membrane extended over the cavity of the support, wherein the membrane is at least partially reinforced by graphene.
Claims18
A MEMS device comprising:
- a support having a cavity therethrough;
- and
- a membrane arranged on the support such that the membrane extends over the cavity of the support,
- wherein the membrane is at least partially reinforced by graphene,
- wherein the membrane is arranged between the support and the graphene, and
- wherein the membrane is displaceable over the cavity.
3 more elements
A method for manufacturing a MEMS device, the method comprising:
- providing a support having a cavity therethrough;
- providing a membrane on the support such that the membrane extends over the cavity of the support, wherein the membrane is displaceable over the cavity;
- and
- reinforcing the membrane at least partially by graphene.
1 more element
Dependencies are inferred from the claim text.