Acoustic wave device with suppressed higher order transverse modes

An acoustic wave device comprising:

• a piezoelectric substrate;
• a pair of interdigital transducer (IDT) electrodes formed on the piezoelectric substrate, a first IDT electrode of the pair of IDT electrodes including a first plurality of electrode fingers, a second IDT electrode of the pair of IDT electrodes including a second plurality of electrode fingers, the first plurality of electrode fingers interleaved with the second plurality of electrode fingers;
• and
• a dielectric film covering at least a part of the piezoelectric substrate and the pair of IDT electrodes, the dielectric film covering an intersection area in which the first plurality of electrode fingers and the second plurality of electrode fingers are interleaved with each other, edge areas adjacent to the intersection area, and gap areas adjacent to the intersection areas, an acoustic velocity of an acoustic wave in the intersection area being greater than the acoustic velocity of the acoustic wave in the edge areas, the dielectric film including a first area covering the intersection area and having a first thickness, a second area covering the edge areas and having a second thickness, and a third area covering the gap areas and having a third thickness, the second thickness being greater than the first thickness, the first thickness being greater than the third thickness.

An acoustic wave device comprising:

• a piezoelectric substrate;
• a pair of interdigital transducer (IDT) electrodes formed on the piezoelectric substrate, a first IDT electrode of the pair of IDT electrodes including a first plurality of electrode fingers, a second IDT electrode of the pair of IDT electrodes including a second plurality of electrode fingers, the first plurality of electrode fingers interleaved with the second plurality of electrode fingers;
• a first dielectric film covering at least a part of the piezoelectric substrate and the pair of IDT electrodes, the first dielectric film covering an intersection area in which the first plurality of electrode fingers and the second plurality of electrode fingers are interleaved with each other, edge areas adjacent to the intersection area, and gap areas adjacent to the intersection areas, an acoustic velocity of an acoustic wave in the intersection area being greater than the acoustic velocity of the acoustic wave in the edge areas, the first dielectric film including a first area covering the intersection area and the edge areas and having a first thickness and a second area covering the gap areas and having a second thickness, the first thickness being greater than the second thickness;
• and
• a second dielectric film covering the first dielectric film in the intersection area.

An acoustic wave device comprising:

• a piezoelectric substrate;
• a pair of interdigital transducer (IDT) electrodes formed on the piezoelectric substrate, a first IDT electrode of the pair of IDT electrodes including a first plurality of electrode fingers, a second IDT electrode of the pair of IDT electrodes including a second plurality of electrode fingers, the first plurality of electrode fingers interleaved with the second plurality of electrode fingers;
• a first dielectric film covering at least a part of the piezoelectric substrate and the pair of IDT electrodes, the first dielectric film covering an intersection area in which the first plurality of electrode fingers and the second plurality of electrode fingers are interleaved with each other, edge areas adjacent to the intersection area, gap areas adjacent to the intersection areas, and dummy areas adjacent to the gap areas, an acoustic velocity of an acoustic wave in the intersection area being greater than the acoustic velocity of the acoustic wave in the edge areas, the first dielectric film having a same thickness in the intersection area, the gap areas, and the dummy areas;
• a passivation film covering the first dielectric film the intersection area, the gap areas, and the dummy areas;
• and
• a second dielectric film covering the passivation film in the intersection area.

An acoustic wave device comprising:

• a piezoelectric substrate;
• a pair of interdigital transducer (IDT) electrodes formed on the piezoelectric substrate, a first IDT electrode of the pair of IDT electrodes including a first plurality of electrode fingers, a second IDT electrode of the pair of IDT electrodes including a second plurality of electrode fingers, the first plurality of electrode fingers interleaved with the second plurality of electrode fingers;
• a first dielectric film covering at least a part of the piezoelectric substrate and the pair of IDT electrodes, the first dielectric film covering an intersection area in which the first plurality of electrode fingers and the second plurality of electrode fingers are interleaved with each other, edge areas adjacent to the intersection area, and gap areas adjacent to the intersection areas, an acoustic velocity of an acoustic wave in the intersection area being greater than the acoustic velocity of the acoustic wave in the edge areas, the first dielectric film having first thickness in the intersection area and the edge areas, and a second thickness in the gap areas, the first thickness being greater than the second thickness;
• and
• a second dielectric film covering the first dielectric film in the intersection area.