Scan mirrors for laser radar
AssigneesNikon Corporation, Nikon Metrology NV
InventorsEric Peter Goodwin, Daniel G. Smith, Alexander Cooper, Mina A. Rezk, Anthony R. Slotwinski, Thomas M. Hedges
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AssigneesNikon Corporation, Nikon Metrology NV
InventorsEric Peter Goodwin, Daniel G. Smith, Alexander Cooper, Mina A. Rezk, Anthony R. Slotwinski, Thomas M. Hedges
Estimating the term…
Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
A beam pointing system, comprising:
A beam pointing system, comprising:
A beam pointing system, comprising:
Dependencies are inferred from the claim text.