Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes

An article to be in rotatable communication with a substrate during substrate cleaning, comprising:

• an annular body comprising a first sidewall, a second sidewall opposite the first sidewall, and an outer circumferential surface connecting the first and the second sidewall, wherein the outer circumferential surface includes at least one patterned surface comprising at least one groove, and the at least one groove includes intersections where the at least one groove crosses over itself.

A substrate cleaning module to support chemical mechanical polishing of a substrate, comprising:

• an enclosure containing cleaning solution;
• a motorized brush to clean a surface of the substrate with the cleaning solution;
• a plurality of substrate rollers configured to receive a side edge of the substrate and to impart a torque to the side edge, wherein each of the plurality of substrate rollers includes a first annular body comprising a first sidewall, a second sidewall opposite the first sidewall, and an outer circumferential surface connecting the first and the second sidewall, wherein the outer circumferential surface includes at least one first patterned surface comprising at least one first groove, the at least one first groove forms a cyclical pattern occurring with a frequency range from 30 cycles per inch to 150 cycles per inch along the outer circumference, and the at least one first patterned surface abuts against the substrate during cleaning of the substrate.