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US 9,636,675 B2Granted
Pillar array structure with uniform and high aspect ratio nanometer gaps
AssigneeInternational Business Machines Corporation
InventorsYann A. Astier, Robert L. Bruce, Joshua T. Smith, Chao Wang, Benjamin H. Wunsch
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Abstract
A technique related to sorting entities is provided. An inlet is configured to receive a fluid, and an outlet is configured to exit the fluid. A nanopillar array, connected to the inlet and the outlet, is configured to allow the fluid to flow from the inlet to the outlet. The nanopillar array includes nanopillars arranged to separate entities by size. The nanopillars are arranged to have a gap separating one nanopillar from another nanopillar. The gap is constructed to be in a nanoscale range.
Claims8
An apparatus comprising:
- an inlet configured to receive a fluid;
- an outlet configured to exit the fluid;
- and
- a nanopillar array connected to the inlet and the outlet, the nanopillar array configured to allow the fluid to flow from the inlet to the outlet;
- wherein the nanopillar array includes nanopillars arranged to separate entities by size;
- wherein the nanopillars are arranged to have a gap separating one nanopillar from another nanopillar;
- wherein the gap is constructed to be in a nanoscale range;
- wherein the nanopillar array comprises an oxide layer applied on the nanopillars, the oxide layer causing the gap to be uniform along a vertical axis of the one nanopillar and the another nanopillar;
- and
- wherein the oxide layer causes unevenness in a diameter of the nanopillars to be uniform, resulting in the gap being uniform along the vertical axis of the one nanopillar and the another nanopillar.
7 more elements
Dependencies are inferred from the claim text.