Apparatus for generating plasma
AssigneeElectronics and Telecommunications Research Institute
InventorsHan Young Yu, Yark Yeon Kim, Won Ick Jang, Yong Sun Yoon, Bong Kuk Lee
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Abstract
Provided herein an apparatus for generating plasma, the apparatus including a nozzle array, first electrode, and housing. The nozzle discharges plasma. The first electrode is disposed to surround the nozzle array. The housing is disposed to surround the nozzle array and first electrode. The nozzle includes a plurality of nozzles disposed adjacent to one another and in the form of an array, each nozzle configured to discharge plasma. Therefore, it is possible to generate a large size plasma evenly and stably.
Claims18
An apparatus for generating plasma, the apparatus comprising:
- a nozzle array configured to discharge plasma;
- a first electrode disposed to surround the nozzle array;
- and
- a housing disposed to surround the nozzle array and the first electrode,
- wherein the nozzle array includes a plurality of nozzles disposed adjacent to one another in the form of an array, each nozzle configured to discharge plasma in a first direction, and
- wherein a cross-section, perpendicular to the first direction, of an exterior surface of each of the plurality of nozzles is polygonal.
An apparatus for generating plasma, the apparatus comprising:
- a plasma generating unit configured to generate plasma, the plasma generating unit including a nozzle array configured to discharge the generated plasma, and a first electrode disposed to surround the nozzle array;
- and
- a plasma outlet configured to outlet the generated plasma,
- wherein the plasma outlet disperses the plasma generated by the plasma generating unit in a plurality of plasma flows,
- wherein the nozzle array includes a plurality of nozzles disposed adjacent to one another in the form of an array, each nozzle configured to discharge the generated plasma in a first direction, and
- wherein a cross-section, perpendicular to the first direction, of an exterior surface of each of the plurality of nozzles is polygonal.
An apparatus for generating plasma, the apparatus comprising:
- a fluid inflow unit configured to generate fluid;
- a fluid moving path configured to move the generated fluid;
- and
- at least one plasma curtain disposed inside or outside the fluid moving path, and configured to spray the plasma to the fluid,
- wherein the at least one plasma curtain comprises a first plasma curtain and second plasma curtain, the first plasma curtain including a plurality of first plasma moving paths arranged parallel to one another in a first direction, the second plasma curtain including a plurality of second plasma moving paths arranged parallel to one another in a second direction that is vertical to the first direction, and the first direction and second direction both in a vertical, horizontal, or a certain angle with respect to a moving direction of the fluid,
- wherein, the first plasma curtain further includes, on the first plasma moving paths arranged parallel to one another, a plurality of first plasma spray nozzles that are each formed in a direction vertical to the moving direction of the fluid, and the second plasma curtain further includes, on the second plasma moving paths arranged parallel to one another, a plurality of second plasma spray nozzles that are each formed in a vertical, horizontal, or certain angle with respect to the moving direction of the fluid, and
- wherein the plasma curtain is configured such that the fluid passes between the second plasma moving paths after passing between the first plasma moving paths successively.
Dependencies are inferred from the claim text.