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US 9,624,101 B2Granted
Article with controlled wettability
AssigneeHewlett-Packard Development Company, L.P.
InventorsPeter Mardilovich, Anthony M. Fuller, Qingqiao Wei, Rio Rivas, David Kamp
Life of this patent
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Abstract
An article is provided, the article including a substrate having a surface with a first wettability characteristic. A nano-structure array is formed on the surface of the substrate to provide a nano-structured surface having a second wettability characteristic. A thin-layer surface coating is formed on the nano-structured surface, the thin-layer surface coating being configured to tune the nano-structured surface to a target wettability characteristic.
Claims4
A method of controlling wettability of a surface of an article, the method comprising:
- forming an array of nano-structures on the surface, the nano-structures providing a nano-structured surface with a modified wettability characteristic, wherein forming the array of nano-structures on the surface includes:
- depositing a first oxidizable material on the surface;
- depositing a second oxidizable material on the first oxidizable material;
- anodizing the second oxidizable material to form a porous oxide having nano-pores;
- anodizing the first oxidizable material so as to at least partially fill the nano-pores with a dense oxide;
- and
- removing the porous oxide, thereby yielding a nano-pillar array on the surface;
- applying a thin-layer surface coating onto the nano-pillar array to tune wettability of the nano-structured surface from the modified wettabilty characteristic toward a target wettability characteristic, wherein applying the thin-layer surface coating includes forming a first layer on the nano-pillar array, and forming a second layer on the first layer, the first layer being configured to chemically bond the second layer to the nano-pillar array, the second layer being a self-assembled monolayer;
- wherein:
- the first oxidizable material is tantalum, and the nano-pillar array is an array of tantalum pentoxide (Ta2O5) nano-pillars;
- the second oxidizable material is aluminum;
- forming the first layer includes depositing hafnium oxide (HfO2) on the nano-pillar array;
- and
- forming the second layer includes applying onto the first layer the self-assembled monolayer, the self-assembled monolayer being selected from the group consisting of 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS), heptadecafluoro-1,1,2,2-tetrahydrodecyl trichlorosilane (HDTS), tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane (FOTS) and octadecyltrichlorosilane (OTS).
11 more elements
A method of controlling wettability of a surface of an article, the method comprising:
- forming an array of nano-structures on the surface, the nano-structures providing a nano-structured surface with a modified wettability characteristic, wherein forming the array of nano-structures on the surface includes:
- depositing a first oxidizable material on the surface;
- depositing a second oxidizable material on the first oxidizable material;
- anodizing the second oxidizable material to form a porous oxide having nano-pores;
- anodizing the first oxidizable material so as to at least partially fill the nano-pores with a dense oxide;
- and
- removing the porous oxide, thereby yielding a nano-pillar array on the surface;
- applying a thin-layer surface coating onto the array of nano-structures to tune wettability of the nano-structured surface from the modified wettabilty characteristic toward a target wettability characteristic, wherein applying the thin-layer surface coating includes forming a first layer on the nano-pillar array, and forming a second layer on the first layer, the first layer being configured to chemically bond the second layer to the nano-pillar array, the second layer being a self-assembled monolayer;
- wherein:
- the first oxidizable material is tantalum, the second oxidizable material is aluminum, and the nano-pillar array is a substantially uniformly spaced array of tantalum pentoxide (Ta2O5) nano-pillars;
- forming the first layer includes depositing hafnium oxide (HfO2) by atomic layer deposition to a thickness of less than half a distance between adjacent nano-pillars;
- and
- forming the second layer includes applying a self-assembled monolayer of 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS) onto the first layer.
10 more elements
A method of controlling wettability of a surface of an article, the method comprising:
- forming a substantially uniformly spaced array of tantalum pentoxide (Ta2O5) nano-pillars on the surface through an anodization process, the nano-pillars providing a nano-structured surface with a modified wettability characteristic;
- applying a thin-layer surface coating onto the array of tantalum pentoxide (Ta2O5) nano-pillars to tune wettability of the nano-structured surface from the modified wettabilty characteristic toward a target wettability characteristic;
- wherein applying the thin-layer surface coating includes:
- depositing onto the array of tantalum pentoxide (Ta2O5) nano-pillars a first layer of hafnium oxide (HfO2), the depositing being accomplished by atomic layer deposition to a thickness of less than half a distance between adjacent nano-pillars;
- and
- forming a second layer by applying a self-assembled monolayer of 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS) onto the first layer.
3 more elements
Dependencies are inferred from the claim text.