Reagent and composition of resist

A composition comprising:

• a reagent;
• a first compound that functions as a generation source of acid;
• wherein a feed of an energy to the reagent or to an acceptor for the reagent receiving the energy generates an intermediate from the reagent;
• wherein the intermediate enhances generation of acid from a precursor, wherein the intermediate is a ketyl radical;
• wherein the reagent is selected from the group consisting of a first reagent, a second reagent and a third reagent;
• wherein:
• the first reagent is represented by formula (I);
• wherein:
• R1 is a hydrogen atom;
• R2 is a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom;
• and
• R3 is a hydrogen atom, a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom;
• the second reagent is represented by formula (II):
• wherein:
• Z is a carbonyl group, a methylene group, an alkoxymethylene, an aryloxymethylene, or a hydroxymethylene;
• R4 is an aryl group or an aryl group containing an aromatic group and a substituent on the aromatic group containing at least one atom other than carbon atom and hydrogen atom;
• and
• R5 is a hydrogen atom, a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom;
• the third reagent includes:
• a hydroxyl group;
• and
• a first cyclic moiety that contains a carbon atom bonded to the hydroxyl group and a hydrogen atom.