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US 9,606,519 B2Granted
Matching process controllers for improved matching of process
AssigneeApplied Materials, Inc.
InventorsJames Robert Moyne, Jimmy Iskandar
Life of this patent
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Abstract
Described herein are methods and systems for chamber matching in a manufacturing facility. A method may include receiving a first chamber recipe advice for a first chamber and a second chamber recipe advice for a second chamber. The chamber recipe advices describe a set of tunable inputs and a set of outputs for a process. The method may further include adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first and second chamber recipe advices.
Claims18
A computer-implemented method, comprising:
- receiving a first chamber recipe advice for a first chamber of a plurality of chambers, the first chamber recipe advice describing a set of tunable inputs and a set of outputs for a process, wherein the first chamber recipe advice comprises a set of first chamber input parameters to tune the set of tunable inputs and a set of first chamber output parameters for the set of outputs;
- receiving a second chamber recipe advice for a second chamber of the plurality of chambers, the second chamber recipe advice describing the set of tunable inputs and the set of outputs for the process, wherein the second chamber recipe advice comprises a set of second chamber input parameters to tune the set of tunable inputs and a set of second chamber output parameters for the set of outputs;
- adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first chamber recipe advice and the second chamber recipe advice;
- and
- generating, by a processing device, a composite chamber recipe advice based on the first and the second chamber recipe advices, the composite chamber recipe advice describing the set of tunable inputs and the set of outputs for the process, wherein the composite chamber recipe advice comprises a set of composite input parameters to tune the set of tunable inputs and a set of composite output parameters for the set of outputs.
2 more elements
A system comprising:
- a memory;
- and
- a processing device coupled to the memory, the processing device configured to:
- receive a first chamber recipe advice for a first chamber of a plurality of chambers, the first chamber recipe advice describing a set of tunable inputs and a set of outputs for a process, wherein the first chamber recipe advice comprises a set of first chamber input parameters to tune the set of tunable inputs and a set of first chamber output parameters for the set of outputs;
- receive a second chamber recipe advice for a second chamber of the plurality of chambers, the second chamber recipe advice describing the set of tunable inputs and the set of outputs for the process, wherein the second chamber recipe advice comprises a set of second chamber input parameters to tune the set of tunable inputs and a set of second chamber output parameters for the set of outputs;
- adjust at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first chamber recipe advice and the second chamber recipe advice;
- and
- generate a composite chamber recipe advice based on the first and the second chamber recipe advices, the composite chamber recipe advice describing the set of tunable inputs and the set of outputs for the process, wherein the composite chamber recipe advice comprises a set of composite input parameters to tune the set of tunable inputs and a set of composite output parameters for the set of outputs.
5 more elements
A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:
- receiving a first chamber recipe advice for a first chamber of a plurality of chambers, the first chamber recipe advice describing a set of tunable inputs and a set of outputs for a process, wherein the first chamber recipe advice comprises a set of first chamber input parameters to tune the set of tunable inputs and a set of first chamber output parameters for the set of outputs;
- receiving a second chamber recipe advice for a second chamber of the plurality of chambers, the second chamber recipe advice describing the set of tunable inputs and the set of outputs for the process, wherein the second chamber recipe advice comprises a set of second chamber input parameters to tune the set of tunable inputs and a set of second chamber output parameters for the set of outputs;
- adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first chamber recipe advice and the second chamber recipe advice;
- and
- generating, by the processing device, a composite chamber recipe advice based on the first and the second chamber recipe advices, the composite chamber recipe advice describing the set of tunable inputs and the set of outputs for the process, wherein the composite chamber recipe advice comprises a set of composite input parameters to tune the set of tunable inputs and a set of composite output parameters for the set of outputs.
2 more elements
Dependencies are inferred from the claim text.