Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
AssigneeReVera Incorporated
InventorsHeath A. Pois, David A. Reed, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton
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Abstract
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.
Claims10
A method of measuring a sample by X-ray reflectance scatterometry, the method comprising:
- impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles, wherein the incident X-ray beam is a converging X-ray beam having a converging angle approximately in the range of 2-10 degrees, and wherein a central axis of the converging X-ray beam has a fixed non-zero incident angle and an azimuthal angle of zero relative to the sample;
- collecting at least a portion of the scattered X-ray beam, wherein collecting the portion of the scattered X-ray beam comprises collecting 0th order but not 1st order diffraction data for the sample;
- positioning the central axis of the converging X-ray beam to a non-zero azimuthal angle at the fixed non-zero incident angle relative to the sample;
- and, subsequently,
- impinging the converging X-ray beam on the sample to generate a second scattered X-ray beam;
- and
- collecting at least a portion of the second scattered X-ray beam, wherein collecting the portion of the second scattered X-ray beam comprises collecting 1st order but not 0th order diffraction data for the sample.
Dependencies are inferred from the claim text.