Fluid processing systems and methods
AssigneeEntegris, Inc.
InventorsSteven M. Lurcott, John E. Q. Hughes, Peter Wrschka, Thomas H. Baum, Donald D. Ware, Peng Zou
Life of this patent
Estimating the term…
Loading patent…
AssigneeEntegris, Inc.
InventorsSteven M. Lurcott, John E. Q. Hughes, Peter Wrschka, Thomas H. Baum, Donald D. Ware, Peng Zou
Estimating the term…
Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.
A method for dispensing material from a liner-based dispenser, comprising:
Dependencies are inferred from the claim text.