# US 9,584,092 B2 · Mechanical resonator with a spring-mass system comprising a phase-change material

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- Number: US 9,584,092 B2
- Document ID: US9584092B2
- Status: Granted
- Kind: B2
- Application number: 14/686,509
- Filed: 2015-04-14
- Published: 2016-10-20
- Granted: 2017-02-28
- Earliest claimed: 2015-04-14
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Johan B. C. Engelen; Mark A. Lantz; Wabe W. Koelmans
- Web page: https://patentgrep.com/patent/US9584092B2

## CPC

- H03H 9/02393: {Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor}
- B81B 3/0045: {Improve properties related to angular swinging, e.g. control resonance frequency}
- B81B 3/007: {For controlling stiffness, e.g. ribs}
- B81B 7/008: {MEMS characterised by an electronic circuit specially adapted for controlling or driving the same (B81B7/0087 takes precedence; arrangements for starting, regulating, braking, or otherwise controlling an actuator H02N; control arrangements or circuits for visual indicators G09G3/00)}
- B81C 1/00698: {Electrical characteristics, e.g. by doping materials}
- H02N 11/00: Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means (by hydrostatic pressure F03B17/04; {by mechanical means F03G7/10;} by dynamo-electric means, {including arrangements of permanent magnets interacting with other permanent magnets,} H02K53/00)
- H03H 9/02244: {of microelectro-mechanical resonators}
- B81B 2203/0163: Spring holders
- B81C 2201/017: Methods for controlling internal stress of deposited layers not provided for in B81C2201/0164 - B81C2201/0169
- H03H 2009/02165: {Tuning}
- H03H 2009/02299: {Comb-like, i.e. the beam comprising a plurality of fingers or protrusions along its length}
- H03H 2009/02322: {Material}
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

## Abstract

A mechanical resonator includes a spring-mass system, wherein the spring-mass system comprises a phase-change material. The mechanical resonator typically comprises an electrical circuit portion, coupled to the phase-change material to alter a phase configuration within the phase-change material. Methods of operation are also disclosed.

## Claims

### Claim 1

A method for tuning a resonance frequency of a spring-mass system of a mechanical resonator comprising a spring-mass system, wherein the spring-mass system comprises a phase-change material, the method comprising:
altering, by a first mechanism, a reversibly transformable crystalline/amorphous phase configuration of the phase-change material to tune the resonance frequency; and
altering, by the first mechanism, the reversibly transformable phase configuration of the phase-change material to at least partially reverse a prior alteration of the reversibly transformable phase configuration of the phase-change material to further tune the resonance frequency.

### Claim 2 (depends on 1)

The method of claim 1, wherein altering the phase configuration of the phase-change material comprises electrically altering the phase configuration of the phase-change material.

### Claim 3 (depends on 2)

The method of claim 2, wherein the phase configuration of the phase-change material is electrically altered by Joule heating.

### Claim 4 (depends on 2)

The method of claim 2, wherein the phase configuration of the phase-change material is electrically altered by electrically heating a heating element in thermal communication with the phase-change material.

### Claim 5 (depends on 1)

The method of claim 1, wherein altering the phase configuration of the phase-change material is performed by applying one or more laser pulses to the phase-change material.

### Claim 6 (depends on 1)

The method of claim 1, wherein altering the phase configuration of the phase-change material is performed so as to change the resonance frequency of the spring-mass system by at least 10%.

### Claim 7 (depends on 1)

The method of claim 1, further comprising monitoring the resonance frequency of the spring-mass system, wherein the altering and the monitoring are iteratively performed to tune the resonance frequency.

### Claim 8 (depends on 1)

The method of claim 1, further comprising fine-tuning, by a second mechanism distinct from the first mechanism, the resonance frequency by modifying a force-gradient of the spring-mass system.

### Claim 9 (depends on 8)

The method of claim 8, wherein the fine tuning does not further alter the phase configuration of the phase-change material.

### Claim 10

A method for tuning a resonance frequency of a spring-mass system of a mechanical resonator comprising a spring-mass system, wherein the spring-mass system comprises a phase-change material, the method comprising:
altering, by a first mechanism, a reversibly transformable phase configuration of the phase-change material to tune the resonance frequency; and
fine-tuning, by a second mechanism distinct from the first mechanism and not affecting the phase configuration, the resonance frequency.