Systems and methods for reverse pulsing
AssigneeLam Research Corporation
InventorsMaolin Long, Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson, John Drewery
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AssigneeLam Research Corporation
InventorsMaolin Long, Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson, John Drewery
Estimating the term…
Systems and methods for reverse pulsing are described. One of the methods includes receiving a digital signal having a first state and a second state. The method further includes generating a transformer coupled plasma (TCP) radio frequency (RF) pulsed signal having a high state when the digital signal is in the first state and having a low state when the digital signal is in the second state. The method includes providing the TCP RF pulsed signal to one or more coils of a plasma chamber, generating a bias RF pulsed signal having a low state when the digital signal is in the first state and having a high state when the digital signal is in the second state, and providing the bias RF pulsed signal to a chuck of the plasma chamber.
A method comprising:
A method comprising:
Dependencies are inferred from the claim text.