Sputter chamber pressure gauge with vibration absorber
AssigneeWestern Digital Technologies, Inc.
InventorsFadzli B. Idris, Ganesen Purushothman
Life of this patent
Estimating the term…
Abstract
A pressure gauge for measuring pressure in a vacuum chamber includes a flange couplable with the vacuum chamber, a pressure sensor configured to measure pressure, an air valve between the flange and the pressure sensor, and a vibration dampening assembly configured to dampen vibration in the pressure gauge. A sputtering system for sputter deposition includes a sputter chamber and the pressure gauge. The flange of the pressure gauge is coupled with the sputter chamber. A method of measuring pressure in a vacuum chamber with the pressure gauge includes coupling the flange with the vacuum chamber, dampening vibration in the pressure gauge with the vibration dampening assembly, and obtaining a pressure measurement from the pressure sensor.
Claims30
A pressure gauge for measuring pressure in a vacuum chamber, the pressure gauge comprising:
- a flange couplable with the vacuum chamber;
- a pressure sensor configured to measure pressure;
- an air valve between the flange and the pressure sensor;
- and
- a vibration dampening assembly disposed between the air valve and the pressure sensor configured to dampen vibration in the pressure gauge.
A sputtering system for sputter deposition, comprising:
- a sputter chamber;
- and
- a pressure gauge comprising:
- a flange coupled with the sputter chamber;
- a pressure sensor configured to measure pressure;
- an air valve between the flange and the pressure sensor;
- and
- a vibration dampening assembly disposed between the air valve and the pressure sensor configured to dampen vibration in the pressure gauge.
A method of measuring pressure in a vacuum chamber with a pressure gauge, the pressure gauge having a flange, a pressure sensor, an air valve between the flange and the pressure sensor, and a vibration dampening assembly, the method comprising:
- coupling the flange with the vacuum chamber;
- dampening vibration in the pressure gauge with the vibration dampening assembly disposed between the air valve and the pressure sensor;
- and
- obtaining a pressure measurement from the pressure sensor.
Dependencies are inferred from the claim text.