Elastic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorMichio Kadota
Life of this patent
Estimating the term…
Abstract
An elastic wave device making use of an SH plate wave propagating in LiNbO3 substrates includes a LiNbO3 substrate, IDT electrodes located on at least one surface of the LiNbO3 substrate, and a support which is bonded to the LiNbO3 substrate such that the support is located outside a region provided with the IDT electrodes and supports the LiNbO3 substrate, wherein θ of the Euler angles (0°, θ, 0°) of the LiNbO3 substrate ranges from about 92° to about 138° and the thickness of the LiNbO3 substrate ranges from about 0.05λ to about 0.25λ, where λ is the wavelength determined by the pitch between electrode fingers of the IDT electrodes.
Claims20
An elastic wave device comprising:
- a LiNbO3 substrate;
- an IDT electrode located on at least one surface of the LiNbO3 substrate;
- and
- a support arranged on the LiNbO3 substrate such that the support is located outside a region provided with the IDT electrode and supports the LiNbO3 substrate;
- wherein
- an elastic wave propagating in the LiNbO3 substrate is an SH plate wave;
- and
- θ of Euler angles (0°, θ, 0°) of the LiNbO3 substrate ranges from about 92° to about 138° and a thickness of the LiNbO3 substrate ranges from about 0.05λ to about 0.25λ, where λ is a wavelength determined by a pitch between electrode fingers of the IDT electrode.
Dependencies are inferred from the claim text.