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US 9,561,982 B2Granted
Method of cleaning glass substrates
AssigneeCorning Incorporated
InventorsDarwin Gene Enicks, Yoshihiro Nakamura, Siva Venkatachalam, Wanda Janina Walczak, Liming Wang
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Abstract
A method of cleaning thin glass substrates comprises applying a sequence of chemical washing steps as the thin glass substrate is being conveyed in a conveyance direction. In addition, surfaces of the glass substrate may be treated to enhance electrostatic discharge properties of the glass substrates.
Claims20
An in-line method of removing contaminants from a surface of a glass substrate comprising the steps of:
- conveying the glass substrate with a conveying device along a conveyance direction, wherein during the conveying at least one surface of the glass substrate is subjected to a surface treatment comprising, sequentially:
- a) exposing the at least one surface of the glass substrate to a liquid discharge comprising ozonated water;
- b) exposing the at least one surface of the glass substrate to a liquid discharge of a first base solution, wherein ultrasonic energy is applied to the first base solution at a frequency in a range from about 20 kHz to about 200 kHz;
- c) exposing the at least one surface of the glass substrate to a liquid discharge of a second base solution;
- d) exposing the at least one surface of the glass substrate to a liquid discharge of a first acid solution to remove metallic ions from the at least one surface of the glass substrate, wherein the first acid solution comprises HCl;
- and
- e) drying the at least one surface of the glass substrate.
4 more elements
An in-line method of removing contaminants from a surface of a glass substrate comprising the steps of:
- conveying the glass substrate with a conveying device along a conveyance direction, wherein during the conveying at least one surface of the glass substrate is subjected to a surface treatment comprising, sequentially:
- a) exposing the at least one surface of the glass substrate to a liquid discharge comprising ozonated water;
- b) exposing the at least one surface of the glass substrate to a liquid discharge of a first base solution;
- c) exposing the at least one surface of the glass substrate to a liquid discharge of a second base solution;
- d) exposing the at least one surface of the glass substrate to a liquid discharge of a first acid solution to remove metallic ions from the at least one surface of the glass substrate, wherein the first acid solution comprises HCl;
- e) drying the at least one surface of the glass substrate;
- and
- wherein an average surface roughness of the glass substrate is increased by exposing the glass substrate to a liquid discharge of a second acid solution.
5 more elements
Dependencies are inferred from the claim text.