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AssigneeJapan Science and Technology Agency
InventorsTakahiko Hariyama, Yasuharu Takaku, Hiroshi Suzuki, Yoshinori Muranaka, Isao Ohta, Masatsugu Shimomura, Daisuke Ishii
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Provided is an observation method by an electron microscope, in which a biological sample can be observed as it is alive and a situation that the biological sample is moving can be observed using an electron microscope, and a composition for evaporation suppression under vacuum, a scanning electron microscope, and a transmission electron microscope used in the method. The sample observation method by an electron microscope according to the invention includes applying a composition for evaporation suppression containing at least one kind selected from an amphiphilic compound, oils and fats, and an ionic liquid to the surface of a sample to form a thin film, and covering the sample with the thin film, and displaying an electron microscopic image of the sample, which is covered with the thin film and accommodated in a sample chamber under vacuum, on a display device.
A sample observation method by an electron microscope, the method comprising:
A composition for evaporation suppression under vacuum, which is used to form a thin film on a surface of a sample including an evaporable substance under vacuum and cover the sample, and thus to impart barrier performance suppressing evaporation of the evaporable substance under vacuum to the evaporable substance, the composition comprising at least one kind selected from an amphiphilic compound, oils and fats, and an ionic liquid, wherein a polymerized film is formed on a surface of a sample as a thin film by irradiating the sample applied with the composition for evaporation suppression with an electron beam or plasma, and the sample is covered with the polymerized film.
A scanning electron microscope, the scanning electron microscope comprising a preliminary exhaust chamber capable of being introduced with a sample to be mounted in a sample chamber in a microscope body, and an exhauster deaerating the sample chamber and the preliminary exhaust chamber,
The scanning electron microscope according to 13, wherein the sample chamber is equipped with a detection position regulatory mechanism capable of three dimensionally regulating a relative position of a secondary electron detector and a sample.
A transmission electron microscope, the transmission electron microscope comprising a preliminary exhaust chamber capable of being introduced with a sample to be mounted in a sample chamber in a microscope body, and an exhauster deaerating the sample chamber and the preliminary exhaust chamber,
Dependencies are inferred from the claim text.