Back to results
US 9,551,677 B2Granted
Angle calibration for grazing-incidence X-ray fluorescence (GIXRF)
AssigneeBruker Jv Israel Ltd.
InventorsIsaac Mazor, Asher Peled
Life of this patent
Estimating the term…
Abstract
A method includes directing an X-ray beam to be incident at a grazing angle on a location on a surface of the sample. An X-ray fluorescence excited at the location is measured. A reflection angle of the X-ray beam from the surface and a transmission angle of the X-ray beam are measured. An angle of incidence of the X-ray beam on the surface is evaluated using the measured reflection and transmission angles, and the measured X-ray fluorescence is analyzed using the evaluated angle of incidence.
Claims20
A method for analysis of a sample, comprising:
- directing an X-ray beam to be incident at a grazing angle on a location on a surface of the sample;
- measuring X-ray fluorescence excited at the location;
- measuring a reflection angle of the X-ray beam from the surface and a transmission angle of the X-ray beam;
- evaluating an angle of incidence of the X-ray beam on the surface using the measured reflection and transmission angles;
- and
- analyzing the measured X-ray fluorescence using the evaluated angle of incidence.
3 more elements
Apparatus, comprising:
- an X-ray source, which is configured to generate and direct an X-ray beam to be incident at a grazing angle on a location on a surface of a sample;
- a first detector, which is configured to measure X-ray fluorescence excited at the location by the X-ray beam;
- a second detector, which is configured to sense a reflection of the X-ray beam from the surface and a transmission of the X-ray beam;
- and
- a processor, which is configured to measure a reflection angle of the reflection and a transmission angle of the transmission, to evaluate an angle of incidence of the X-ray beam on the surface using the measured reflection and transmission angles, and to analyze the measured X-ray fluorescence using the evaluated angle of incidence.
2 more elements
Dependencies are inferred from the claim text.