US 9,548,677 B2 · Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions

Abstract

A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electrostatic comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.

Claims20

Dependent claims

A method for selectively modifying a property of a plurality of nanoparticles through a coupling interaction between the plurality of nanoparticles, comprising:

providing a first nanoparticle;
providing a first MEMS positioning assembly having a first positioning portion, the first MEMS positioning assembly configured to selectively displace the first positioning portion along a first axis in response to a first voltage and to selectively displace the first positioning portion along a second axis substantially normal to the first axis in response to a second voltage;
associating the first nanoparticle with the first positioning portion;
providing a second nanoparticle spaced a distance from the first nanoparticle;
modulating the distance between the first nanoparticle and the second nanoparticle by displacement of the first positioning portion along at least one of the first axis and the second axis to obtain a coupling interaction between the first nanoparticle and the second nanoparticle.

2 more elements

A nanopositioning system for producing a coupling interaction between a first nanostructure and a second nanostructure, comprising:

a first microelectromechanical system (MEMS) positioning assembly, the first MEMS positioning assembly including a first static comb drive actuator and a first dynamic comb drive actuator, the first static comb drive actuator configured to selectively displace the first dynamic comb drive actuator along a first axis in relation to the first static comb drive actuator upon application of a first voltage to the first static comb-drive actuator;
a first micro-needle associated with the first MEMS positioning assembly and axially displaceable along the first axis;
a second MEMS positioning assembly, the second MEMS positioning assembly including a second static comb drive actuator and a second dynamic comb drive actuator, the second static comb drive actuator configured to selectively displace the second dynamic comb drive actuator along a third axis in relation to the second static comb drive actuator upon application of a second voltage to the second static comb-drive actuator;
a second micro-needle associated with the second MEMS positioning assembly and axially displaceable along the third axis;
the first micro-needle and the second micro-needle being substantially parallel and coplanar;
wherein the first micro-needle is selectively positionable along the first axis by operation of the first MEMS positioning assembly and the first positioning electrode to modulate a distance between the first micro-needle and the second micro-needle.

3 more elements

Dependencies are inferred from the claim text.

Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions

Life of this patent

Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions

Life of this patent

Abstract

Claims20