Spatial light modulator based on metamaterial structure and preparation method thereof
AssigneeSuzhou Institute of Nano-Tech and Nano Sciences, Chinese Academy of Sciences
InventorsQin Chen, Shichao Song
Life of this patent
Estimating the term…
Abstract
A spatial light modulator based on a metamaterial structure and a preparation method thereof. The spatial light modulator includes an array of optical function elements and a control circuit. The optical function element includes a metamaterial structure formed by a metal nanostructure layer and a metal reflector layer, with a medium layer and nonmetal conducting material layer being provided between the metal nanostructure layer and the metal reflector layer. The spatial light modulator is simple in structure, high in integration, easy in manufacture and low in cost. Furthermore, the spatial light modulator is capable of high-speed modulation, the depth of modulation is controlled easily, and a low drive voltage may be obtained.
Claims12
A spatial light modulator based on a metamaterial structure, comprising an array of optical function elements wherein each optical function element comprises a metamaterial structure comprising a metal nanostructure layer and a metal reflector layer, with a medium layer and a nonmetal conducting material layer being provided between the metal nanostructure layer and the metal reflector layer;
- and
- an impedance of the metamaterial structure, at a set frequency and under a set bias voltage, is equal to or approximate to 376.7Ω, where “approximate to” means that the deviation amplitude is within ±5%.
Dependencies are inferred from the claim text.