Growth of carbon nanotube (CNT) leads on circuits in substrate-free continuous chemical vapor deposition (CVD) process
AssigneeThe Boeing Company
InventorKeith Daniel Humfeld
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Abstract
A method and structure for an electrical device and a plurality of electrical circuits including a plurality of carbon nanotubes (CNTs). The method can include forming a first CNT catalyst layer including a plurality of first CNT catalyst plugs, a plurality of electrical circuits electrically coupled to the first CNT catalyst layer, and a second CNT catalyst layer including a plurality of second CNT catalyst plugs electrically coupled to the second CNT catalyst layer. CNTs may be simultaneously formed on the plurality of first and second CNT catalyst plugs within a chemical vapor deposition (CVD) furnace.
Claims13
A method for forming a plurality of electrical circuits, comprising:
- forming a first carbon nanotube (CNT) catalyst layer comprising a plurality of first CNT catalyst plugs over a release layer;
- forming a plurality of electrical circuits over the first CNT catalyst layer, wherein each electrical circuit is in electrical communication with the first CNT catalyst layer;
- forming a second CNT catalyst layer comprising a plurality of second CNT catalyst plugs over the plurality of electrical circuits, wherein each electrical circuit is in electrical communication with the second CNT catalyst layer;
- removing the release layer to expose the plurality of first CNT catalyst plugs;
- and
- simultaneously forming a plurality of CNTs on the plurality of first CNT catalyst plugs and on the second plurality of CNT catalyst plugs within a chamber of a reactor.
Dependencies are inferred from the claim text.